PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

Abstract

This paper discuss the design and fabrication of NO₂ gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In₂O₃ material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al₂O₃) with silver paste. The In₂O₃ layer provides\ resistance change when it is exposed by NO₂ gas. It indicates that this sensor device has a potency to be used as NO₂ detector.